This is a Pulsed Excimer Laser based thin film deposition unit. The Excimer laser (Compex Pro made by Coherent Inc.) delivers a maximum of 700 mJ power at the wavelengths of 193 nm (ArF) and 248 nm (KrF) with a repetition rate of 10 Hz. The deposition chamber (Ms. Excel Instruments) is equipped with turbo pump (base 10-7 pressure ~ 10 mbar) and works under various gaseous environment. The substrate can be heated up to 900^oC and it has six automated target carousel.

Pulsed Laser deposition system Upgradation

Installation of RHEED Gun in Pulsed Excimer Laser Deposition unit: For in situ analysis of the deposited film by laser ablation.

Instrument model: TorrRHEED TM from STAIB instruments, Germany

Technical Specification

• The electron source energy ~ 35 KeV
• Double differential pumping arrangement: To maintain pressure difference between the electron gun and the thin film deposition chamber.
• RHEED data analysis software: KSA-400 software.