This is a Pulsed Excimer Laser based thin film deposition unit. The Excimer laser (Compex Pro made by Coherent Inc.) delivers a maximum of 700 mJ power at the wavelengths of 193 nm (ArF) and 248 nm (KrF) with a repetition rate of 10 Hz. The deposition chamber (Ms. Excel Instruments) is equipped with turbo pump (base 10-7 pressure ~ 10 mbar) and works under various gaseous environment. The substrate can be heated up to 900oC and it has six automated target carousel.
Installation of RHEED Gun in Pulsed Excimer Laser Deposition unit: For in situ analysis of the deposited film by laser ablation.
Instrument model: TorrRHEED TM from STAIB instruments, Germany